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Intellectual Property Law
: TinytechIPUS Patent 7463116 - Complementary MEMS resonators
This patent from Sony teaches a microresonator array configured to balance oscillation forces leading to more stable operation. Claim 1 reads:
1. A micro-resonator comprising:
a plurality of micro-resonant elements having a beam structure facing an input electrode and an output electrode which use a micromechanical oscillation provided on the same substrate, wherein, a micro-resonant element to oscillate in a first phase and a micro-resonant element to oscillate in a second phase that is a reverse phase to the first phase are disposed to be a pair.
Full post as published by TinytechIP on December 11, 2008 (boomark / email).
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